This standard was last reviewed and confirmed in 2021. Therefore this version remains current.
Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
Status: PublishedPublication date: 1979-09
Edition: 1Number of pages: 10
Technical Committee: ISO/TC 135/SC 6 Leak testing
- ICS :
- 23.160 Vacuum technology
This standard contributes to the following Sustainable Development Goal:
Buy this standard
|std 1 61|
|std 2 61||Paper|
A standard is reviewed every 5 years
Stage: 90.93 (Confirmed)
Got a question?
Check out our FAQs
+41 22 749 08 88
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)
Keep up to date with ISO
Sign up to our newsletter for the latest news, views and product information.