Under publication
Technical Specification
ISO/TS 25138
Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry
Reference number
ISO/TS 25138
Edition 3
© ISO 2025
Under publication Technical Specification
Under publication
Final production steps (up to seven weeks).
Will replace ISO/TS 25138:2019

Abstract

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

General information

  • Status
     : Under development
    Stage
    : International Standard under publication [60.00]
  • Edition
     : 3
  • Technical Committee :
    ISO/TC 201/SC 8
    ICS :
    71.040.40 
  • RSS updates

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