ISO/DIS 17973
u
ISO/DIS 17973
86468

Status : Under development

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Format Language
std 1 63 PDF
std 2 63 Paper
  • CHF63
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Abstract

ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

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General information

  •  : Under development
    : Close of voting [40.60]
  •  : 3
     : 11
  • ISO/TC 201/SC 7
    71.040.40 
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