Abstract
This document defines the most important quantities that characterize an energy-dispersive X‑ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this document.
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General information
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Status: PublishedPublication date: 2021-02Stage: International Standard published [60.60]
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Edition: 3Number of pages: 13
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Technical Committee :ISO/TC 202ICS :71.040.99
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Life cycle
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Previously
WithdrawnISO 15632:2012
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