This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
Status: PublishedPublication date: 2022-06
Edition: 1Number of pages: 35
Technical Committee: ISO/TC 201/SC 1 Terminology
This standard contributes to the following Sustainable Development Goals:
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ISO 18115-3:2022Stage: 60.60
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