This standard was last reviewed and confirmed in 2021.
Therefore this version remains current.
Abstract
PreviewISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
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Status: PublishedPublication date: 2013-10
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Edition: 1Number of pages: 46
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- ICS :
- 71.040.40 Chemical analysis
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| Format | Language | |
|---|---|---|
| std 1 166 | PDF + ePub | |
| std 2 166 | Paper |
- CHF166
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