ISO 13424:2013

Published (Edition 1, 2013)

This publication was last reviewed and confirmed in 2021. Therefore this version remains current.

ISO 13424:2013

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Abstract

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

General information

Status
: Published

Publication date
: 2013-10

Stage
: International Standard confirmed [90.93]
Edition
: 1

Number of pages
: 46
Technical Committee :
ISO/TC 201/SC 7

ICS :
71.040.40
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