Reference number
ISO/TR 15969:2001
© ISO 2025
Technical Report
ISO/TR 15969:2001
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Edition 1
2001-06
Withdrawn
Withdrawn (Edition 1, 2001)

Abstract

This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods

of sputtered depth measurement described in this Technical Report are applicable to techniques of surface

chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a

typical sputtered depth of up to severalmicrometres.

General information

  • Status
     : Withdrawn
    Publication date
     : 2001-06
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 12
  • Technical Committee :
    ISO/TC 201/SC 4
    ICS :
    71.040.40 
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